{"id":573372,"date":"2024-11-05T19:38:00","date_gmt":"2024-11-05T19:38:00","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/iec-62047-122011\/"},"modified":"2024-11-05T19:38:00","modified_gmt":"2024-11-05T19:38:00","slug":"iec-62047-122011","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/iec\/iec-62047-122011\/","title":{"rendered":"IEC 62047-12:2011"},"content":{"rendered":"<p>IEC 62047-12:2011 specifies a method for bending fatigue testing using resonant vibration of microscale mechanical structures of MEMS (micro-electromechanical systems) and micromachines. This standard applies to vibrating structures ranging in size from 10 \u00b5m to 1 000 \u00b5m in the plane direction and from 1 \u00b5m to 100 \u00b5m in thickness, and test materials measuring under 1 mm in length, under 1 mm in width, and between 0,1 \u00b5m and 10 \u00b5m in thickness. The main structural materials for MEMS, micromachine, etc. have special features, such as typical dimensions of a few microns, material fabrication by deposition, and test piece fabrication by means of non-mechanical machining, including photolithography. The MEMS structures often have higher fundamental resonant frequency and higher strength than macro structures. To evaluate and assure the lifetime of MEMS structures, a fatigue testing method with ultra high cycles (up to 10<sup>12<\/sup>) loadings needs to be established. The object of the test method is to evaluate the mechanical fatigue properties of microscale materials in a short time by applying high load and high cyclic frequency bending stress using resonant vibration.<\/p>\n","protected":false},"excerpt":{"rendered":"<p><b>Semiconductor devices &#8211; Micro-electromechanical devices &#8211; Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures<\/b><\/p>\n<table style=\"width: 100%\" border=\"0\" cellspacing=\"0\" cellpadding=\"0\">\n<tbody>\n<tr>\n<td>Published By<\/td>\n<td>Publication Date<\/td>\n<td>Number of Pages<\/td>\n<\/tr>\n<tr>\n<td><a href=\"https:\/\/pdfstandards.shop\/product-category\/publishers\/iec\/\"><b>IEC<\/b><\/a><\/td>\n<td>2011-09-13<\/td>\n<td>64<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":573384,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[577,2636],"product_tag":[],"class_list":{"0":"post-573372","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-31-080-99","7":"product_cat-iec","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/573372","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/573384"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=573372"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=573372"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=573372"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}