{"id":445895,"date":"2024-10-20T08:44:03","date_gmt":"2024-10-20T08:44:03","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iso-81812023\/"},"modified":"2024-10-26T16:16:17","modified_gmt":"2024-10-26T16:16:17","slug":"bs-iso-81812023","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iso-81812023\/","title":{"rendered":"BS ISO 8181:2023"},"content":{"rendered":"
PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
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2<\/td>\n | National foreword <\/td>\n<\/tr>\n | ||||||
6<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
7<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
9<\/td>\n | 1 Scope 2 Normative references 3 Terms and definitions <\/td>\n<\/tr>\n | ||||||
10<\/td>\n | 4 Terms related to atomic layer deposition 4.1 General terms <\/td>\n<\/tr>\n | ||||||
11<\/td>\n | 4.2 Film growth of atomic layer deposition <\/td>\n<\/tr>\n | ||||||
12<\/td>\n | 4.3 Classification of atomic layer deposition <\/td>\n<\/tr>\n | ||||||
15<\/td>\n | Annex A (informative) Examples of schematic diagrams for a time separated ALD and a spatial ALD <\/td>\n<\/tr>\n | ||||||
17<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Atomic layer deposition. Vocabulary<\/b><\/p>\n |