This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer.<\/p>\n
This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.<\/p>\n
| PDF Pages<\/th>\n | PDF Title<\/th>\n<\/tr>\n | ||||||
|---|---|---|---|---|---|---|---|
| 2<\/td>\n | National foreword <\/td>\n<\/tr>\n | ||||||
| 6<\/td>\n | Foreword <\/td>\n<\/tr>\n | ||||||
| 7<\/td>\n | Introduction <\/td>\n<\/tr>\n | ||||||
| 9<\/td>\n | 1 Scope 2 Normative references 3 Terms and definitions <\/td>\n<\/tr>\n | ||||||
| 11<\/td>\n | 4 Symbols and abbreviated terms <\/td>\n<\/tr>\n | ||||||
| 13<\/td>\n | 5 Definition of the energy resolution 6 Reference materials and energy determination 6.1 General 6.2 Materials selection for energy scale calibration <\/td>\n<\/tr>\n | ||||||
| 14<\/td>\n | 6.3 Binding energy measurement of graphite in the XPS 7 Measurement procedure and energy resolution determination 7.1 General <\/td>\n<\/tr>\n | ||||||
| 16<\/td>\n | 7.2 Predetermination of binding energy 7.2.1 Obtain graphite and the other reference sample 7.2.2 Measure C1s of graphite by using the XPS 7.3 Setup of the S\/TEM and the EELS, and sample setting 7.4 First energy step, \u03b4E1, calibration 7.4.1 EELS acquisition set-up 7.4.2 Determining the EELS first energy step, \u03b4E1 <\/td>\n<\/tr>\n | ||||||
| 17<\/td>\n | 7.4.3 Acquisition of carbon K-edge EEL spectrum 7.4.4 Calculate calibrated energy step \u03b4E1C <\/td>\n<\/tr>\n | ||||||
| 20<\/td>\n | 7.5 Measurement of peak close to the zero-loss peak, ECZLP, for the other reference sample using energy step \u03b4E1 7.5.1 EEL spectrum acquisition of the second reference sample using energy step \u03b4E1 <\/td>\n<\/tr>\n | ||||||
| 21<\/td>\n | 7.5.2 Obtain the value for CH2 between the zero-loss peak and the peak ECZLP 7.5.3 Calculate the peak ECZLP energy <\/td>\n<\/tr>\n | ||||||
| 22<\/td>\n | 7.6 Second energy step, \u03b4E2, calibration 7.6.1 Determining the EELS second energy step, \u03b4E2 <\/td>\n<\/tr>\n | ||||||
| 23<\/td>\n | 7.6.2 Acquire ECZLP EEL spectrum 7.6.3 Obtain the value for CH3 between the zero-loss peak and peak ECZLP 7.6.4 Calculate calibrated energy step \u03b4E2C 7.7 Determining the calibrated EEL spectrometer energy resolution, \u0394E 7.7.1 Acquisition of a ZLP EEL spectrum 7.7.2 Obtain the value for CH4 for the zero-loss peak 7.7.3 Calculate EEL spectrometer energy resolution, \u0394E <\/td>\n<\/tr>\n | ||||||
| 24<\/td>\n | 7.8 Record items <\/td>\n<\/tr>\n | ||||||
| 25<\/td>\n | 8 Uncertainty for the measurement result of energy resolution <\/td>\n<\/tr>\n | ||||||
| 26<\/td>\n | Annex A (informative) Example of measurement procedure for energy resolution determination <\/td>\n<\/tr>\n | ||||||
| 34<\/td>\n | Annex B (informative) Correspondence between energy values of XPS C1s and EELS carbon K edge <\/td>\n<\/tr>\n | ||||||
| 36<\/td>\n | Bibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":" Microbeam analysis. Analytical electron microscopy. Method for the determination of energy resolution for electron energy loss spectrum analysis<\/b><\/p>\n |