ISO 22493:2008

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Microbeam analysis — Scanning electron microscopy — Vocabulary

Published By	Publication Date	Number of Pages
ISO	2008-10	30

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Categories: 01.040.37 - Image technology (Vocabularies), 37.020 - Optical equipment, ISO

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Description

ISO 22493:2008 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate.

The vocabulary is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of the vocabulary are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.

Additional information

Published Code	ISO
Published By	International Organization for Standardization
Publication Date	2008-10
Pages Count	30
Language	English
Edition	1
File Size	276.5 KB
ICS Codes	01.040.37 - Image technology (Vocabularies) 37.020 - Optical equipment

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ISO 22493:2008

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