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BS ISO 8181:2023

BS ISO 8181:2023

$102.76

Atomic layer deposition. Vocabulary

Published By Publication Date Number of Pages
BSI 2023 18
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PDF Catalog

PDF Pages PDF Title
2 National foreword
6 Foreword
7 Introduction
9 1 Scope
2 Normative references
3 Terms and definitions
10 4 Terms related to atomic layer deposition
4.1 General terms
11 4.2 Film growth of atomic layer deposition
12 4.3 Classification of atomic layer deposition
15 Annex A (informative) Examples of schematic diagrams for a time separated ALD and a spatial ALD
17 Bibliography

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BS ISO 8181:2023
$102.76