BS ISO 14594:2014
$142.49
Microbeam analysis. Electron probe microanalysis. Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy
| Published By | Publication Date | Number of Pages |
| BSI | 2014 | 28 |
This International Standard gives the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer, and the sample that need to be taken into account when carrying out electron probe microanalysis. It also defines procedures for the determination of beam current, current density, dead time, wavelength resolution, background, analysis area, analysis depth, and analysis volume.
This International Standard is intended for the analysis of a well-polished sample using normal beam incidence, and the parameters obtained can only be indicative for other experimental conditions.
This International Standard is not designed to be used for energy dispersive X-ray spectroscopy.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 6 | Foreword |
| 7 | Section sec_1 Section sec_2 Section sec_3 Section sec_3.1 Section sec_3.2 Section sec_3.3 Section sec_3.4 Section sec_3.5 1 Scope 2 Normative references 3 Terms and definitions |
| 8 | Section sec_3.6 Section sec_3.7 Section sec_3.8 Section sec_4 Section sec_5 Section sec_5.1 Section sec_5.2 Section sec_5.2.1 Section sec_5.2.2 Section sec_5.2.3 4 Abbreviated terms 5 Experimental parameters 5.1 General 5.2 Parameters related to the primary beam |
| 9 | Section sec_5.2.4 Section sec_5.3 Section sec_5.3.1 Section sec_5.3.2 Section sec_5.3.3 Section sec_5.3.4 5.3 Parameters related to wavelength dispersive X-ray spectrometers |
| 10 | Section sec_5.3.5 Section sec_5.3.6 Section sec_5.4 Section sec_5.4.1 Section sec_5.4.2 5.4 Parameters related to the specimen |
| 11 | Section sec_5.4.3 Section sec_6 Section sec_6.1 Section sec_6.2 Section sec_6.2.1 Section sec_6.2.2 Section sec_6.2.2.1 Section sec_6.2.2.2 6 Procedures and measurements 6.1 General 6.2 Beam current |
| 12 | Table tab_b Figure fig_1 Section sec_6.3 Section sec_6.3.1 Section sec_6.3.1.1 Figure fig_2 6.3 Parameters related to measured peaks |
| 13 | Section sec_6.3.1.2 Section sec_6.3.1.3 Section sec_6.3.2 Section sec_6.3.2.1 Section sec_6.3.2.2 Table tab_c Figure fig_3 Section sec_6.3.3 Section sec_6.3.3.1 |
| 14 | Section sec_6.3.3.2 Section sec_6.3.3.3 Section sec_6.4 Section sec_6.4.1 Section sec_6.4.2 Section sec_6.4.3 Section sec_6.4.4 6.4 Parameters related to the specimen |
| 15 | Section sec_7 7 Test report |
| 16 | Annex sec_A Annex A (informative) Methods of estimating analysis area |
| 17 | Table tab_e Figure fig_A.1 |
| 18 | Annex sec_B Annex B (informative) Methods of estimating analysis depth |
| 20 | Annex sec_C Annex sec_C.1 Annex sec_C.2 Annex C (informative) Method of estimating X-ray analysis volume by applying the Monte Carlo (MC) simulation |
| 21 | Figure fig_C.1 |
| 22 | Annex sec_C.3 Annex sec_C.4 |
| 23 | Figure fig_C.2 |
| 24 | Reference ref_1 Reference ref_2 Reference ref_3 Reference ref_4 Reference ref_5 Reference ref_6 Reference ref_7 Reference ref_8 Reference ref_9 Reference ref_10 Reference ref_11 Reference ref_12 Bibliography |
